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6 Figure 2. Sales of SF 6 by End-Use Category (1980-1999) 0 1,000 2,000 3,000 4,000 5,000 6,000 7,000 8,000 1980 1981 1982 1983 1984 1985 1986 1987 1988 1989 1990Get price


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Used for the manufacturing of semiconductor devices, flat panels, photovoltaic panels and MEMS. Sulfur Hexafluoride (Sulfr hexafluoride) is more and more used for the manufacturing of semiconductor devices such as IC (integrated circuits), flat panels, photovoltaic panels and MEMS (Micro-Electro-Mechanical-Systems).Get price